A simple analytical threshold voltage model for lightly doped tri-gate MOSFETs has been developed, using the superposition of the threshold voltages of a symmetric and an asymmetric double-gate MOSFET. The model has been verified by comparison with experimental and simulation results of tri-gate FinFETs with various fin widths and channel lengths. Excellent agreement between model, experimental and simulation results is obtained, demonstrating the validity of the proposed threshold voltage model. (C) 2010 Elsevier Ltd. All rights reserved.