An original process based on cold plasma assisted polymerization of tetramethyldisiloxane (TMDSO) in the presence of O-2 was developed to cover substrates showing various shapes (plate and foam). In the frame of catalytic application, this coating has to act as a bonding layer for the deposition of active phase such as VOx/TiO2 well-known for its properties in NOx and volatile organic compounds abatement and in the production of chemical intermediates. Good results were obtained by the deposition of a 5-mu m thick polysiloxane film followed by a thermal treatment under air at 650 degrees C and by a remote nitrogen plasma post treatment. This procedure led to a silica-like layer allowing its coating in an aqueous suspension of TiO2. Such a multilayered material can be obtained homogeneously on the whole surface of a sample showing a 3D open geometry like metallic foam. Characterizations of the different steps of the elaborated multilayer material were performed by Fourier transformed infrared spectroscopy, Raman spectrometry, X-ray photoelectron spectroscopy, and electron probe micro-analyzer. POLYM. ENG. SCI., 51:940-947, 2011. (C) 2011 Society of Plastics Engineers