The mechanism or polymerization of p-xylylene and its derivatives is analyzed at the theoretical level. The polymerization reaction takes place in vacuo without any catalyst. The first step is a pyrolytic decomposition of starting material for polymerization, p-cyclophane, a cyclic dimer of p-xylylene, into biradical linear dimer and finally into two quinonoid monomeric molecules of p-xylylene. The quinonoid monomer is diamagnetic i.e., it has a singlet ground state. The monomers after pyrolysis, when the temperature is lowered, do not re-form cyclic dimers but instead polymerize into long chain molecules. The initiation of polymerization requires dimerization of two monomers leading to formation of a genuine noncoupled biradical dimer. The chain molecular grow through the propagation reaction only one unit at a little, by the attachment of a monomer to a radical chain end. In this work the pyrolysis reaction, the initiation reaction and the first propagation steps of parylene polymerization (up to pentamer) are studied in details using different quantum chemical methods: AM1 and PM6 semiempirical methods and density functional theory (DFT) approach using B3LYP functional with two basis sets of different size (SVP and TZVP).