Amorphous LiCo1/3Mn1/3Ni1/3O2 thin films were deposited on the NASICON-type Li-ion conducting glass ceramics, Li1+x+yAlxTi2-xSiyP3-yO12 (LATSP), by radio frequency (RF) magnetron sputtering below 130 degrees C. The amorphous films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The Li/PEO18-Li(CF3SO2)(2)N/LATSP/LiCo1/3Mn1/3Ni1/3O2/Au all-solid-state cells were fabricated to investigate the electrochemical performance of the amorphous films. It was found that the low-temperature deposited amorphous cathode film shows a high discharge voltage and a high discharge capacity of around 130 mAh g(-1). (C) 2010 Elsevier B.V. All rights reserved.