화학공학소재연구정보센터
Journal of Crystal Growth, Vol.316, No.1, 71-74, 2011
Epitaxial SrRuO3/BiFeO3/SrRuO3 heterostructure sputtered at low temperature
SrRuO3(SRO)/BiFeO3(BFO)/SrRuO3 heterostructure is fabricated on the (0 0 1) SrTiO3 substrate by magnetron sputtering, in which BFO film is prepared at a low temperature of 525 degrees C. The structural and physical properties of the SRO/BFO/SRO heterostructure are investigated. It is found that the whole SRO/BFO/SRO heterostructure is epitaxially grown on SrTiO3 substrate with (0 0 1) orientation. The remanent polarization and coercive field of a typical SRO/BFO/SRO capacitor, measured at 300 kV/cm, are 38.5 mu C/cm(2) and 120 kV/cm, respectively. The capacitor shows little fatigue up to 10(10) switching cycles, and relatively small leakage current density of 7.5 x 10(-4) A/cm(2) at 120 kV/cm. Moreover, the SRO/BFO/SRO heterostructure exhibits a weak ferromagnetic behavior with a saturation magnetization of 9.3 emu/cm(3) and a coercive field of 338 Oe. (C) 2010 Elsevier B.V. All rights reserved.