화학공학소재연구정보센터
Journal of Crystal Growth, Vol.312, No.15, 2201-2205, 2010
Growth of hexagonal and cubic InN nanowires using MOCVD with different growth temperatures
We have performed a detailed investigation of the metal-organic chemical vapor deposition (MOCVD) growth and characterization of InN nanowires formed on Si(1 1 1) substrates under nitrogen rich conditions. The growth of InN nanowires has been demonstrated by using an ion beam sputtered (similar to 10 nm) Au seeding layer prior to the initiation of growth. We tried to vary the growth temperature and pressure in order to obtain an optimum growth condition for InN nanowires. The InN nanowires were grown on the Au+In solid solution droplets caused by annealing in a nitrogen ambient at 700 degrees C. By applying this technique, we have achieved the formation of InN nanowires that are relatively free of dislocations and stacking faults. Scanning electron microscopy (SEM) showed wires with diameters of 90-200 nm and lengths varying between 3 and 5 mu m. Hexagonal and cubic structure is verified by high resolution X-ray diffraction (HR-XRD) spectrum. Raman measurements show that these wurtzite InN nanowires have sharp peaks E-2 (high) at 491 cm(-1) and A(1) (LO) at 591 cm(-1). (C) 2010 Elsevier B.V. All rights reserved.