Journal of Crystal Growth, Vol.312, No.8, 1388-1390, 2010
Highly strained InAs quantum wells on InP substrates for mid-IR emission
Optical emission characteristics of indium arsenide (InAs) quantum wells were studied using organometallic vapor phase epitaxy (OMVPE). Low growth temperature (<500 degrees C) and tertiarybutylarsine (TBA) and/or arsine precursors were applied for this study. Several growth parameters such as growth temperature, growth rate, interruption time between growths of layers, and mixture of group V precursors were investigated. It was found that relatively high growth rate of InAs (0.3 nm/s) and a mixture flow of TBA and AsH3, allowed growth of up to 9 nm thick InAs quantum wells without significant strain relaxation. Photoluminescence (PL) wavelengths of 2.52 mu m were observed at room temperature (RI) from a 9 nm InAs double quantum well (DQW) in a separate confinement heterostructure (SCH) structure. (C) 2009 Elsevier B.V. All rights reserved.
Keywords:High-resolution X-ray diffraction;Strain;Organometallic vapor phase epitaxy;InAs;TBA;Semiconductor III-V materials