Single-phase Zn0.95-xCuxLi0.05O thin films have been prepared on Pt (1 1 1)/Ti/SiO2 substrates by reactive magnetron sputtering method. The XRD, XPS and absorption measurements confirmed the polycrystalline nature of the films and the substitution of Zn2+ by Cu2+ ions. The sputtered Zn0.90Cu0.05Li0.05O film shows multiferroic properties exhibiting a saturated ferroelectric loop with a remanent polarization of 6 mu C/cm(2) and a saturated loop with a saturation magnetization of 0.43 mu(B)/Cu at room temperature. The origins of the ferromagnetism and ferroelectricity in these films are discussed. (C) 2009 Elsevier B.V. All rights reserved.