This Study demonstrates the fabrication of a stable superhydrophobic Surface with low contact angle hysteresis (CAH) using all arrangement of nanoscale TiO2 spheres. The control of precursor quantity is selected as the key factor in determining surface toughness that significantly intensifies water contact angle (CA) of TiO2 films. After surface fluorination treatment, the anatase-type crystalline surfaces exhibit good water repellency (CA similar to 166.1 degrees), low CAH (similar to 6 degrees), and superhydrophobic stability (>60 min). Enhanced water repellency is attributed to the fact that the higher density of TiO2 spheres results in more tortuous three-phase contact line, leading to the self-cleaning effect. Such a unique textured Surface imparts many promising potentials for engineering and the development of optics devices with robust superhydrophobic materials. (C) 2009 Elsevier Inc. All rights reserved