Fluoropolymer transparent thin films were deposited on different substrates by one-step vacuum evaporation method, which exhibit superhydrophobic property with water contact angle (CA) greater than 150 degrees. Polytetrafluoroethylene (PTFE) film with network structure shows high oleophobicity with oil CA of 138 degrees, whereas polytetrafluoroethylene-perfluoropropylvinylethers (PFA) film with particle structure is superoleophilicity with oil CA near 0 degrees. It is believed that different conformation of -CF2- groups at the surface lead to this different surface activity. (C) 2010 Wiley Periodicals, Inc. J Appl Polym Sci 120: 524-529, 2011