Experimental data were obtained to reveal the complex dynamics of thin liquid films evaporating on heated horizontal surfaces, including formation and expansion of dry spots that occur after the liquid films decreased below critical thicknesses. The critical thickness of water film evaporating on various material surfaces is measured in the range of 60-150 mu m, increasing with contact angle and heat flux while decreasing with thermal conductivity of the heater material. In the case of hexane evaporating on a titanium surface, the liquid film is found resilient to rupture, but starts oscillating as the averaged film thickness decreases below 15 mu m. (C) 2010 Elsevier Ltd. All rights reserved.