Electrochimica Acta, Vol.55, No.9, 3279-3285, 2010
A SERS investigation of Cu electrodeposition in the presence of the model leveller 4-{2-[1-(2-cyanoethyl)-1,2,3,4-tetrahydroquinolin-6-yl]diazenyl} benzonitrile
In situ SERS measurements were performed during the potentiostatic electrodeposition of Cu from an acidic cupric sulphate solution containing 4-{2-[1-(2-cyanoethyl)-1,2,3,4-tetrahydroquinolin-6yl]diazenyl} benzonitrile (CTDB). CTDB is a model leveller for Cu electroplating in ULSI semiconductor fabrication. The cathodic reactivity of CTDB at the diazo bridge was highlighted, leading to the formation of 3-cyan aniline and 6-amino-1-(2-cyanoethyl)-2,3,4-trihydro-quinoline and to denitrilation. (C) 2010 Elsevier Ltd. All rights reserved.