The influence of frequency on the grain size of pulse plated gold has been investigated. Potential pulses of 3.5 V and galvanic pulses of 1 A/cm(2) were used in two separate experiments for the lateral electrodeposition of gold grains in 50 mu m gaps. The circuit model and frequency of operation have been studied by electrochemical impedance spectroscopy. A significant control over the average grain size was achieved between 98.4 and 693.3 nm at frequencies varied from 5 Hz to 1 kHz. Frequency dependency on grain size was also demonstrated on single samples using a frequency scan. (C) 2010 The Electrochemical Society. [DOI: 10.1149/1.3355030] All rights reserved.