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Electrochemical and Solid State Letters, Vol.13, No.3, S1-S1, 2010
Electrically Benign Dry-Etching Method for Rutile TiO2 Thin-Film Capacitors with Ru Electrodes (vol 13, G1, 2010)
Keywords:annealing;dielectric thin films;electrochemical electrodes;etching;leakage currents;photoresists;ruthenium;thin film capacitors;titanium compounds