Bilayered BiFeO3/ZnO thin films, which were grown on the SrRuO3-buffered MgO(100) substrate by off-axis radio frequency magnetron sputtering, are investigated for their current-voltage relationships at varying voltages and temperatures. A resistive hysteresis and a diodelike behavior are observed for the bilayered BiFeO3/ZnO thin films. The resistive hysteresis and the rectification ratio are enhanced with increasing electrical field and temperature. The observed behavior arises from the interfacial depletion layer and ferroelectric switching, where the charge coupling between the semiconducting ZnO and the ferroelectric BiFeO3 layers occurs. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3264093] All rights reserved.