수열합성 공정을 통한 알루미나 코팅층의 나노구조 조절에 의한 반사방지 특성의 변화

이윤이; 손대희; 이승호; 이근대; 홍성수; 박성수; Yun-Yi Lee; Dae Hee Son; Seung-Ho Lee; Gun-Dae Lee; Seong-Soo Hong; Seong Soo Park

Applied Chemistry for Engineering, Vol.21, No.5, 564-569, October, 2010

Export Citation

수열합성 공정을 통한 알루미나 코팅층의 나노구조 조절에 의한 반사방지 특성의 변화

Change of Anti-reflective Optical Property by Nano-structural Control of Alumina Layer through Hydro-thermal Process

이윤이, 손대희¹, 이승호 ², 이근대 , 홍성수 , 박성수 ^†

부경대학교 응용화학공학부
¹(주)CFC Teramate
²한국세라믹기술원 복합재료 센터

Yun-Yi Lee, Dae Hee Son¹, Seung-Ho Lee², Gun-Dae Lee , Seong-Soo Hong , and Seong Soo Park^†

Division of Applied Chemical Engineering, Pukyong National University, Busan 608-739, Korea
¹Pukyong Post Business Incubator #101, CFC Teramate Co. Ltd., Busan 608-739, Korea
²Composite Materials Center, Korea Institute of Ceramic Eng. & Tech., Seoul 153-801, Korea

E-mail:

초록

박막 및 디스플레이 분야에서는 광학 부품소재의 우수한 광 투과성과 투명성을 요구하는 수요가 증가함에 따라 우수한 반사방지 특성의 부여에 대하여 관심이 집중되고 있는 실정이다. 본 연구에서는 반사방지 기능을 부여하기 위하여 졸-겔법에 의한 수열합성법을 통하여 기저 물질 표면에 산화알루미늄을 나노 크기 꽃 형태의 프레임 구조를 가진 단일 산화물층을 형성시키고자 하였다. 코팅 층 시편의 특성은 UV-Vis 분광기, FT-IR 분광기, XRD 및 FE-SEM을 이용하여 분석하였다. 알루미나 졸이 코팅된 시편들의 모폴로지는 수열합성의 온도와 시간 및 초음파 제공에 의해 조절되도록 하였다. 꽃 형태의 나노 프레임 구조 형태로 구성된 코팅 층에서 높은 광투과율과 반사방지특성이 발현되었다.

Highly anti-reflective optical property has been focussed in the field of thin film and display because of increasing demands to the high transparency and clearness of optical component. In this study, to obtain anti-reflective property, the formation of aluminium oxide with nanoscaled flowerlike frame structure was introduced as oxide material monolayer on the substrate by hydrothermal synthesis through sol-gel method. The properties of coating layer were measured by the means of UV-Vis spectroscopy, FT-IR spectroscopy, XRD, and FE-SEM. The morphology of coating layer in alumina-sol coated samples was controlled by hydrothermal temperature and time with aid of ultrasound. It was found that high transparency and anti-reflective optical properties were obtained the formation of flowerlike nanoframe structure.

Keywords:anti-reflective;flowerlike;alumina;sol-gel method

[References]

Lee JJ, Choi SY, J. Korean Ceram. Soc., 34, 79 (1997)
Japan Patent 06-328469 (1994)
Uhlmann DR, Suratwala T, Davidson K, Boulton JM, Teowee G, J. Non-Cryst. Solids., 218, 113 (1997)
Shackelford JF, Introduction to Materials Science for Engineers, 336, Macmillan Press, New York (1985)
Kim TH, Jang LW, Lee DC, Choi HJ, Jhon MS, Macromol. Rapid Commun., 23(3), 191 (2002)
Kaless A, Kaiser N, Surf. Coat. Technol., 200, 58 (2005)
Stedile FC, De Barros Jr. BAS, Thin Solid Films, 170, 285 (1989)
Lanc DW, Coath JA, Rogers KD, Hunnikin BJ, Beldon HS, Thin Solid Films, 221, 262 (1992)
Agashe C, Marathe BR, Takwale MG, Bhide VG, Thin Solid Films, 164, 261 (1988)
Melsheimer J, Ziegler D, Thin Solid Films, 109, 71 (1983)
Mohallem NDS, Aegerter MA, J. Non-Cryst. Solids, 100, 526 (1988)
Cox JT, Hass G, in Physics of Thin Films, ed. Hass G, Thun RE, 2, 239, Academic Press, London (1964)

[Related Articles]

[1] Lee JJ, Choi SY, J. Korean Ceram. Soc., 34, 79 (1997)

[2] Japan Patent 06-328469 (1994)

[3] Uhlmann DR, Suratwala T, Davidson K, Boulton JM, Teowee G, J. Non-Cryst. Solids., 218, 113 (1997)

[4] Shackelford JF, Introduction to Materials Science for Engineers, 336, Macmillan Press, New York (1985)

[5] Kim TH, Jang LW, Lee DC, Choi HJ, Jhon MS, Macromol. Rapid Commun., 23(3), 191 (2002)

[6] Kaless A, Kaiser N, Surf. Coat. Technol., 200, 58 (2005)

[7] Stedile FC, De Barros Jr. BAS, Thin Solid Films, 170, 285 (1989)

[8] Lanc DW, Coath JA, Rogers KD, Hunnikin BJ, Beldon HS, Thin Solid Films, 221, 262 (1992)

[9] Agashe C, Marathe BR, Takwale MG, Bhide VG, Thin Solid Films, 164, 261 (1988)

[10] Melsheimer J, Ziegler D, Thin Solid Films, 109, 71 (1983)

[11] Mohallem NDS, Aegerter MA, J. Non-Cryst. Solids, 100, 526 (1988)

[12] Cox JT, Hass G, in Physics of Thin Films, ed. Hass G, Thun RE, 2, 239, Academic Press, London (1964)