A novel fluorine-contained random copolymer (2,3,4,5,6-pentafluorostyrene)-r-poly(4-vinyl benzocyclobutene) (P(PFSt-r-4-VBCB)) was synthesized, and then spin-coated onto Si substrates followed by thermal cross-linking to produce the copolymer ultra-thin films. Although the surface modi. cation with the P(PFSt-r-4-VBCB) film was simple and did not rely on special surface chemical reactions, the film could decrease the surface energy significantly, more importantly; the film demonstrated excellent stability and corrosion resistance. This random copolymer film could find broad applications in modifying various solid surfaces to enhance the properties such as corrosion resistance and solvent resistance. (C) 2010 Elsevier B.V. All rights reserved.