Zinc(II) coordination compounds may provide a better source for ZnO thin films obtaining, since ZnO was found as the final product of their thermal decomposition. Thin films of zinc benzoate have been obtained on silicon substrates by matrix assisted pulsed laser evaporation (MAPLE) technique, using a Nd:YAG laser working at 266 nm. A comparative study of 1% zinc benzoate frozen solution in methanol at different fulences was carried out for 20.000 laser pulses: for the best deposition fluence a double deposition time was employed. Comparative thermal analysis and non-isothermal kinetic investigation of Zn(C6H5COO)(2)center dot 2H(2)O dehydration and decomposition was performed. Thin films of ZnO have been obtained by thermal treatment of the MAPLE obtained thin films, according to the thermal analysis and decomposition kinetics of zinc benzoate. The obtained morphologies, before and after thermal treatment, have been investigated by atomic force microscopy (AFM). (C) 2009 Elsevier B.V. All rights reserved.