Dense doped ceria films are promising candidate electrolytes for solid oxide fuel cells (SOFCs) operated at intermediate temperature (similar to 500 degrees C). In this work, detailed microstructural features of Gd-doped ceria (GDC) electrolyte film supported by Ni-GDC cermet anode were studied. Formation of inhomogeneous microstructures in the GDC film was observed, which was enhanced in the region near the film/anode interface due to the Ni diffusion from the anode. Then, the mechanism by which Ni affects the microstructure was explained by computer simulation of formation and development of defect clusters. (C) 2010 Elsevier B.V. All rights reserved.