Lithium meta-silicate (LSO) thin film was fabricated on various insulating substrate by a pulsed laser deposition (PLD) method. By X-ray diffraction measurement, as-prepared thin film is found to be amorphous structure. Temperature dependence of the ionic conductivity was measured at the temperature range from 500 to 700 K. It was found that the ionic conductivity depended on the substrate species and in-plane direction. The substrate dependence of ionic conduction of amorphous LSO thin film may originate from the structural modulation of the thin film at the vicinity of the hetero-interface. (C) 2009 Elsevier B.V. All rights reserved.