The catalytic methane decomposition on well-defined nickel (Ni) based model anodes of SOFCs fabricated on various oxide ion conductors was investigated. Stripe-shaped Ni films deposited on substrates of various oxide ionic conductors as model anodes of SOFCs, and the substrates were annealed in slightly humidified methane of 1.2%H2O-CH4 at 1073 K. During annealing, carbon deposition did not clearly proceed on Ni films. When dry methane was supplied during the cooling process after annealing, catalytic methane decomposition was proceeded on Ni films. The morphology and the amount of carbon deposition on Ni films were different due to the substrate materials. The Ni film on the doped lanthanum gallate showed the lowest carbon deposition rate in comparison with the Ni films on the stabilized zirconias and the gadolia doped ceria. (C) 2008 Elsevier B.V. All rights reserved.