Microfabricated solid oxide fuel cells (SOFC) have been integrated onto silicon substrates. The SOFC membrane contained a sputter deposited 8YSZ electrolyte layer with a thickness of 750 nm. It is supported on the anode side by a nickel grid grown by electroplating. The grid has either a hexagonal or a spiderweb pattern with maximal free standing length of 80 gm and a height comprised between 4 and 6 gm. The SOFC membranes have diameter up to 5 mm and are mechanically stable up to 550 degrees C. Completed with porous platinum anode and cathode, they show a maximal open circuit voltage (OCV) of 280 mV at 450 degrees C, under a mixture Of H-2 and Ar at the anode. (C) 2008 Elsevier B.V. All rights reserved.