The paper describes the fabrication of micro gears of diameter and height I mm by micro powder injection moulding. 316L stainless steel powder of 2.4 mu m (d(50)) is mixed with a multi-component-wax-based binder systerm The feedstock is then injection-moulded into micro gears followed by debinding and sintering. The microstructure of the micro gear at its tooth and hub is studied by electron backscattered diffraction. The average grain size at the hub is similar to 5 mu m. However, a high content of annealing twin and a significant grain growth is found at the tooth. (c) 2008 Elsevier B.V. All rights reserved.