The decomposition of dimethyl methylphosphonate (DMMP) was studied by temperature programmed desorption (TPD), X-ray photoelectron spectroscopy (XPS), and Auger electron spectroscopy (AES) on TiO2-supported Pt, Au, and Au-Pt clusters as well as on TiO2(110) itself. In agreement with previous work, TPD experiments for DMMP on TiO2(110) showed that methyl and methane were the main gaseous products. Multiple DMMP adsorption-reaction cycles on TiO2 (110) demonstrated that active sites for DMMP decomposition were blocked after a single cycle, but some activity for methyl production was sustained even after five cycles. Furthermore, the activity of the TiO2 surface could be regenerated by heating in O-2 at 800 K or heating in vacuum to 965 K to remove surface carbon and phosphorus, which are byproducts of DMMP decomposition. On 0.5 ML Pt clusters deposited on TiO2 (110), TPD studies of DMMP reaction showed that CO and H, were the main gas products, with methyl and methane as minor products. The Pt clusters were more active than TiO2 both in terms of the total amount of DMMP reaction and the ability to break C-H, P-O, and P-OCH3 bonds in DMMP. However, the Pt clusters had no sustained activity for DMMP decomposition, since the product yields dropped to zero after a single adsorption-reaction cycle. This loss of activity is attributed to a combination of poisoning of active sites by surface phosphorus species and encapsulation of the Pt clusters by reduced titania after heating above 600 K due to strong metal support interactions (SMSI). On 0.5 ML Au clusters, CO and H-2 were also the main products detected in TPD experiments, in addition to methane and methyl produced from reaction on the support. The Au clusters were less active for DMMP decomposition to CO and H-2 as well as P-O bond scission, but surface phosphorus was removed from the Au clusters by desorption at similar to 900 K. Au-Pt bimetallic clusters on TiO2 (110) were prepared by depositing 0.25 ML of Pt followed by 0.25 ML of Au, and the bimetallic surfaces exhibited activity intermediate between that of pure Pt and pure Au in terms of CO and H-2 desorption yields. However, there is evidence that the production of methane from DMMP decomposition occurs at Au-Pt sites.