Micropatterns of ZnO nanoarrays were simply and successfully fabricated in an aqueous solution without any high-temperature treatment and/or expensive catalyst. In situ forced hydrolysis of patterned anhydrous zinc acetate, derived by ultraviolet irradiation with a photomask, resulted in heterogeneous nucleation and growth to form ZnO nanoarrays. Micropatterns of ZnO nanoarrays were characterized by FE-SEM and XRD. ZnO nanoarrays were well site-selectively deposited on anhydrous zinc acetate coated regions at 88 degrees C. HR-TEM clarified the formation mechanism in which anhydrous zinc acetate showed a tendency of forced hydrolyzation to ZnO nanocrystals at the initial stage in the reaction solution.