화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.6, 2644-2647, 2009
Apparatus to measure electron reflection
Controlling reflection of electrons from an array of electrodes is a key feature of an electron lithography system currently under development. Here the authors describe a technique for characterizing this control. The apparatus is only 30 mm long, features simple colinear electron optics and a photocathode that emits a well-directed, monochromatic beam. The overall energy resolution is better than 1 eV.