Journal of Vacuum Science & Technology B, Vol.27, No.3, 1784-1788, 2009
Fabrication and characterization of novel hybrid green light emitting diodes based on substituting n-type ZnO for n-type GaN in an inverted p-n junction
Details of the fabrication and characterization of hybrid green light emitting diodes, composed of n-ZnO/(InGaN/GaN) multi-quantum-wells/p-GaN on AlN/sapphire, are reported. Scanning electron microscope, atomic force microscopy, high resolution x-ray diffraction, and photoluminescence were used to study the hybrid device. The effects of solvents, annealing, and etching on n-ZnO are discussed. Successful hybridization of ZnO and (In)GaN into a green light emitting diode was realized.
Keywords:aluminium compounds;annealing;atomic force microscopy;etching;gallium compounds;III-V semiconductors;II-VI semiconductors;indium compounds;light emitting diodes;photoluminescence;p-n junctions;scanning electron microscopy;semiconductor quantum wells;X-ray diffraction;zinc compounds