Scanning proximal probes for parallel imaging and lithography

Ivanova K; Sarov Y; Ivanov T; Frank A; Zollner J; Bitterlich C; Wenzel U; Volland BE; Klett S; Rangelow IW; Zawierucha P; Zielony M; Gotszalk T; Dontzov D; Schott W; Nikolov N; Zier M; Schmidt B; Engl W; Sulzbach T; Kostic I

Journal of Vacuum Science & Technology B, Vol.26, No.6, 2367-2373, 2008

Ivanova K, Sarov Y, Ivanov T, Frank A, Zollner J, Bitterlich C, Wenzel U, Volland BE, Klett S, Rangelow IW, Zawierucha P, Zielony M, Gotszalk T, Dontzov D, Schott W, Nikolov N, Zier M, Schmidt B, Engl W, Sulzbach T, Kostic I

Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.

Keywords:atomic force microscopy;cantilevers;lithography;microactuators;piezoresistive devices