Pulsed electron-beam deposition (PED) is a recently developed pulsed energy ablation/deposition technique with distinct advantages for its cost effectiveness, nature of the electron-material interactions, and large-scale production. By the proper control of the ablation/deposition parameters, one can produce high purity quantum dots and thin films in situ in vacuum chamber. Further, PED can also be used for unique material syntheses by introducing reactive gases in the chamber. However, little systematic work has been done to demonstrate PED's potential applications except for few on film and nanoparticle fabrications. Particular efforts are made here to study the spatial variations of the deposited materials. (C) 2008 American Vacuum Society.