화학공학소재연구정보센터
Journal of the American Chemical Society, Vol.130, No.46, 15224-15224, 2008
Epitaxial Ternary Nitride Thin Films Prepared by a Chemical Solution Method
It is indispensable to use thin films for many technological applications. This is the first report of epitaxial growth of ternary nitride AMN(2) films. Epitaxial. tetragonal SrTiN2 films have been successfutly prepared by a chemical solution approach, polymer-assisted deposition. The structural, etectrical, and optical properties of the films are also investigated.