Superhydrophobic and highly oleophobic surface with micro-nanoscale binary structure (MNBS) was fabricated on the glass substrates with nano-silica modified by perfluoropolyether (PFPE) derivative. It was found that the formation of the MNBS and the modification of nano-silica by functionalized PFPE can be achieved simultaneously. The reaction time for preparing the fluorinated silica from nano-silica and functionalized PFPE plays an important role in the water and oil repellency of the coating surface. The maximum static water contact angle of this coating surface was 151.4A degrees and its hysteresis was 2.9A degrees, while for tetradecane it was 132.2A degrees and 20.5A degrees, respectively. Furthermore, the thermal property of the surface was also investigated. The main thermal weight loss proceeded from 241.7 A degrees C and the total weight loss of the fluorinated silica was less than 30% even when heated to 800 A degrees C.