화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.13, 3395-3398, 2009
A new in-situ surface treatment during MBE-grown PbSe on CaF2/Si(111) heterostructure
The continual improvement of IV-VI materials grown by molecular beam epitaxy (MBE) is a key step in the development of IV-VI infrared semiconductor devices on silicon substrates. This study presents a novel surface-treatment method which is carried out during MBE growth of monocrystalline PbSe on Si(1 1 1)-oriented substrates. Details of the experimental procedures are described and supported by reflection high-energy electron diffraction (RHEED) patterns. The effect of the in-situ surface-treatment method is exhibited in the forms of improved electrical and morphological properties of PbSe thin films. Specially, the carrier mobility increases almost three-fold at 77 K and nearly two-fold at 300 K. The density of the growth pits undergoes almost three-fold reduction, whereas the density of the threading dislocations decreases around four-fold. (C) 2009 Elsevier B.V. All rights reserved.