Mn distribution behaviors and magnetic properties of the Ge0.96Mn0.04 films have been investigated. Different nominal amounts, 12 and 80 nm, of Ge0.96Mn0.04 were grown on Si (0 0 1) substrates at 250 degrees C using solid source molecular beam epitaxy. Electron energy loss spectroscopy (EELS) indicates that Mn diffuses toward the surface during the growth. The room-temperature ferromagnetism is observed for the as-grown and annealed films. Magnetic moment versus temperature curves are correlated with the structural properties. (c) 2008 Elsevier B.V. All rights reserved.