This paper describes a template-assisted method that combines the advantages of photolithography ana electrochemical synthesis to construct a wafer-scale Au flower-like structure microarray. The detailed information about the effect of concentration of electrolyte, pattern of template substrate, applied potential, and surfactant on the formation of Au flower-like microarray is investigated. The possibility of using such a microarray as electrodes for their electrochemical properties is also tested by CV experiments. Crown Copyright (C) 2009 Published by Elsevier Ltd. All rights reserved.