High-quality graphene sheets (GS) were synthesized on stainless steel substrates at similar to 500 degrees C by microwave plasma chemical vapor deposition (CVD) in an atmosphere of methane/hydrogen mixture. The GS product was characterized to contain mostly 1- or 2-3-layers using scanning electron microscopy, transmission electron microscopy/selective area electron diffraction, atomic force microscopy, and Raman spectroscopy. The present CVD approach is capable of producing graphenes with high yield and high purity with no carbon impurities such as carbon nanotubes. (C) 2008 Elsevier B.V. All rights reserved.