화학공학소재연구정보센터
Applied Surface Science, Vol.255, No.16, 7212-7215, 2009
Highly oriented (100) ZnO thin films by spray pyrolysis
Undoped ZnO thin films have been deposited onto glass substrates by spray pyrolysis. The structural, electrical and optical properties were studied on thin films, prepared from precursor solutions with varying the ethanol concentrations. X-ray diffraction studies have shown polycrystalline nature of the films with a hexagonal wurtzite-type structure. The preferential orientation plane (1 0 0) of the ZnO thin film is found to be sensitive to ethanol concentration. The texture coefficient (TC) and grain size value have been calculated. Also ethanol concentration was found to have significant effect on sheet resistivity of the films. (C) 2009 Elsevier B. V. All rights reserved.