화학공학소재연구정보센터
Applied Surface Science, Vol.255, No.4, 1519-1522, 2008
Teaching SIMS fundamentals using the FIB ion microscope
The use of liquid metal source ion beams for microscopy and ion milling applications has increased dramatically in recent years. This paper explores the teaching of ion-solid sputtering and ionization phenomena without the facility to mass analyse the ionised yield available in dedicated SIMS instrumentation. Fundamental parameters can be demonstrated during the limited period of an undergraduate laboratory teaching session. (C) 2008 Elsevier B.V. All rights reserved.