A portable aerosol sampler was developed by modifying a commercial filter-type sampler. A tandem sampler head was made in order to remove coarse particles in the first stage, and enhance the linear velocity of the air flow in the second stage. Proper collection plate was also discussed by comparing three kinds of materials (Ag plate, ITO glass and Si wafer). Results on SEM observation concluded that Si wafer was appropriate. Time-of-flight secondary ion mass spectrometry (TOF-SIMS) analysis was performed for a particle collected on Si wafer. It was shown that TOF-SIMS analysis was successful and Si+ signal from the substrate caused little problem. (C) 2008 Published by Elsevier B.V.