It is urgently necessary for secondary ion mass spectrometry (SIMS) analysis to overcome influence on the compositional distribution of the sample in vacuum chamber. In this study, we investigated the handling of the ice protective film in techniques such as the gallium focused ion beam (Ga FIB) etching. Here we demonstrate the technique with frozen Hymenochirus boettgeri red blood cell. The red blood cells covered with an ice protective film were cross-sectioned by using Ga FIB, and the two-dimensional SIMS mapping over the cross-section was carried out. The distributions of Na and K were observed on the cross-section and surface of red blood cell with ice protective film. This result agrees qualitatively with physiological intracellular and extracellular concentrations of vital cells. The technique used for SIMS was proved to be a reliable method, preserving the cells in their living state. (c) 2008 Elsevier B.V. All rights reserved.