We have developed a positron microbeam using magnetic lenses based on the commercial scanning electronmicroscope (SEM). A slow positron beam was generated using a handmade source with Na-22 and a solid neon moderator. The beam diameter was 3.9 mu m on a target. Two-dimensional image of S parameter was successfully obtained. By introducing a beam pulsing section, positron lifetime measurement beam is also available. (C) 2008 Elsevier B.V. All rights reserved.