Multilayered Ge nanocrystals embedded in SiOxGeNy films have been fabricated on Si substrate by a (Ge + SiO2)/SiOxGeNy superlattice approach, using a rf magnetron sputtering technique with a Ge + SiO2 composite target and subsequent thermal annealing in N-2 ambient at 750 degrees C for 30 min. X-ray diffraction (XRD) measurement indicated the formation of Ge nanocrystals with an average size estimated to be 5.4 nm. Raman scattering spectra showed a peak of the Ge-Ge vibrational mode downward shifted to 299.4 cm(-1), which was caused by quantum confinement of phonons in the Ge nanocrystals. Transmission electron microscopy (TEM) revealed that Ge nanocrystals were confined in (Ge + SiO2) layers. This superlattice approach significantly improved both the size uniformity of Ge nanocrystals and their uniformity of spacing on the 'Z' growth direction. (C) 2008 Elsevier B. V. All rights reserved.