Highly transparent and conducting fluorine-doped zinc oxide thin films, consisting of spherical nanometer-sized grains, were synthesized onto soda-lime glass substrate by using a chemical spray unit. The effect of fluorine doping concentration in starting solution was investigated. Both doped and undoped films were preferentially oriented along [002] direction. Electrical resistivity decreases from 5.7 x 10(-2) to 8.6 x 10(-3) ohm-cm after 1 at.% fluorine doping, and increases for higher doping concentration. However, surface morphology of films obtained at 3 at.% fluorine doping appeared smooth and uniform. A shift of the edge of the optical transmission in the ultraviolet region as a result of fluorine doping was obtained. (c) 2008 Elsevier B.V. All rights reserved.