Commercial PTFE and soda lime glass were irradiated by keVO(3+) and F4+. After irradiation, in contrast to the decrease of contact angle on PTFE, contact angle on glass increased apparently. SEM observation revealed that irradiation did not cause noticeable change in surface topological structure. XPS was used to investigate chemical structure changes on the surface. Defluorination effect and formation of oxygen containing group caused by irradiation were considered to the reason of more hydrophilic PTFE surface. On the surface of irradiated glass, more carbon contaminations were observed. The differences of underlying physical and chemical processes between the two kinds of samples are discussed. (C) 2008 Elsevier B.V. All rights reserved.