The preparation of silica nanoparticles through solid-fed flame synthesis was investigated experimentally and theoretically. Monodispersed submicrometer- and micrometer-sized silica powders were selected as solid precursors for feeding into a flame reactor. The effects of flame temperature, residence time, and precursor particle size were investigated systematically. Silica nanoparticles were formed by the nucleation, coagulation, and surface growth of the generated silica vapors due to the solid precursor evaporation. Numerical modeling was conducted to describe the mechanism of nanoparticle formation. Evaporation of the initial silica particles was considered in the modeling, accounting for its size evolution. Simultaneous mass transfer modeling due to the silica evaporation was solved in combination with a general dynamics equation solution. The modeling and experimental results were in agreement. Both results showed that the methane flow rate, carrier gas flow rate, and initial particle size influenced the effectiveness of nanoparticle formation in solid-fed flame synthesis. (C) 2009 American Institute of Chemical Engineers AIChE J, 55: 885-995, 2009