Advanced Materials, Vol.21, No.40, 4050-4050, 2009
Low-Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography
A new and cost-effective replica fabrication method for transparent and hard molds used in imprinting lithography is presented. The process uses a polymer copy as a carrier. Replicated hard molds eliminate the need for direct contact between the master and the patterned polymer on the substrate, and thus reduce contamination of the master.