The fabrication of multifunctional surface patterns by employing removable metal barrier nanostructures and site-selective assembly of chemical active monolayers is reported. Latex bead gold projection patterns serve as barrier structures to obtain high-fidelity nanostructures consisting of n-octade-cyl/n-thiolundecyl multifunctional self-assembled monolayers (NanoMuSes). Large scale, high resolution, stable and addressable chemically active surface patterns are obtained.