Applied Surface Science, Vol.254, No.12, 3710-3714, 2008
Photoluminescence of very thin oxide/a-Si : H structures passivated in HCN solutions
In this contribution we present new experimental facts concerning evolution of the a-Si:H photoluminescence (PL) spectra, recorded at 6 K, induced by both formation of very thin oxide layer in the surface region of the semiconductor by nitric acid solutions and passivation of a-Si:H defect states using HCN aqueous solutions. a-Si:H layers were deposited on both n-type of crystalline Si and the Corning glass. The analysis of the set of PL spectra - their interpretation - indicates that two explanations of blue shifts of the PL band maxima are possible. The first is connected with formation of several structurally different a-Si:H-based phases inside the amorphous matrix and/or with the Street model of recombination of localized electron-hole pairs coupled with the optical phonon in Si. Additionally, as it was stated, the wet chemical oxidation of 1 mu m thick a-Si:H layers deposited on the glass can induce formation of hydrogenated micro-sized a-Si grains. Passivation procedure performed in the HCN solution can transform an equivalent part of the a-Si: H semiconductor to a-Si:CN. If the multiphase model is accepted for interpretation of the PL spectra then the following main PL transitions related with different phases were observed: 1.20, 1.25, 1.38, 1.41, 1.44, and 1.48 eV. (C) 2007 Elsevier B.V. All rights reserved.