화학공학소재연구정보센터
Applied Surface Science, Vol.254, No.7, 1993-1996, 2008
Effects of growth temperature on Li-N dual-doped p-type ZnO thin films prepared by pulsed laser deposition
Li-N dual-doped p-type ZnO (ZnO:(Li,N)) thin films have been prepared by pulsed laser deposition. The introduction of Li and N was confirmed by secondary ion mass spectrometry measurements. The structural, electrical, and optical properties as a function of growth temperature were investigated in detail. The lowest room-temperature resistivity of 3.99 Omega cm was achieved at the optimal temperature of 450 degrees C, with a Hall mobility of 0.17 cm(2/)V s and hole concentration of 9.12 x 10(18) cm(-3). The ZnO:(Li,N) films exhibited good crystal quality with a complete c-axis orientation, a high transmittance (about 90%) in the visible region, and a predominant UV emission at room temperature. The two-layer-structure pZnO:(Li,N)/n-ZnO homojunctions were fabricated on a sapphire substrate. The current-voltage characteristics exhibited the rectifying behavior of a typical p-n junction. (C) 2007 Elsevier B.V. All rights reserved.