In order to study the microstructure of cadmium telluride (CdTe) photovoltaic thin film solar cells, manufactured by an in-line manufacturing process, Scanning Electron Microscopy characterization (SEM) and X-ray diffraction (XRD) characterization were performed. SEM measurement showed that no substantial changes in the grain structure of CdTe layers occurred during the Cadmium Chloride (CdCl2) treatment. No change in the cubic CdTe lattice parameter "a" was observed for the CdCl2 treated sample. It is inferred that the primary effect of the CdCl2 treatment in the devices studied is the passivation of grain boundaries and bulk defects. XRD studies show a loss of preferred orientation (as determined from the peak ratios) of planes during the copper compound treatment indicating recrystallization of the grains due to the Cu treatment. Also the Cu treated sample showed decrease in value of the lattice parameter "a". (C) 2007 Elsevier B.V. All rights reserved.