Microcrystalline silicon solar cells deposited by VHF-PECVD with or without HWCVD grown p/i interface buffer layer were investigated. We studied long-term stability under storage in ambient atmosphere and performed light soaking experiments. Cells with i-layers covering a wide range of crystalline volume fractions were studied. All cells were stable or degraded slightly after storage for 2 years in air, regardless of crystalline volume fraction or presence of p/i buffer interface. Upon light soaking all cells show efficiency degradation to more or less extent depending on crystal volume fraction of the i-layer and the presence of the buffer layer: the solar cell with high crystal volume fraction are nearly stable, cells with high amorphous volume fraction degrade by up to 20%. The solar cell with HWCVD buffer layer shows better stability in the high efficiency range of relative efficiency degradation typically less than 10% after 1000 h AM 1.5 light soaking. The efficiency degradation is mainly caused by Voc and FF deterioration while Jsc is almost stable. (c) 2007 Published by Elsevier B.V.